Coordinate system:

pos x-Direction = Jura side

pos y-Direction = Down

Zero-point is in the top right corner in Beam direction

absolute Position of PI Stages:

Pos 1: x=100 mm, y=79 mm (Hits in APV 3 und 8-9 in p-Seite und 14 und 17 in n-Seite )

Pos 2: x=69.3 mm, y=79 mm (Hits in APV 3-4 und 8-9 in p-Seite und 13 und 18 in n-Seite) 

Pos 3: x=38.6 mm, y=84 mm

Pos 4: x=130.7 mm, y=84 mm

Pos 5: x=30.5 mm, y= 99.74 mm (wide side top)

Pos 6: x=136.08 mm, y= 91.49 mm (narrow side top)

Pos 7: x= 30.5 mm, y= 79 mm (wide side center)

Pos 8: x=136.08 mm, y= 79 mm (narrow side center)

Pos 9: x=30.5 mm, y= 60.67 mm (wide side down)

Pos 10: x= 136.08mm, y=68.9 mm (narrow side down)